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Novel Teeter-Totter 2-Axes MEMS Magnetometer with Equal Sensitivities

مؤلف البحث
M. A. Farghaly,V. Rochus, X. Rottenberg, U. S. Mohammed and H. A. C. Tilmans
المشارك في البحث
سنة البحث
2013
مجلة البحث
Eurosime 2013 conference Proc.
الناشر
NULL
عدد البحث
NULL
تصنيف البحث
3
صفحات البحث
6
موقع البحث
http://www.eurosime.org/
ملخص البحث

In this paper, we demonstrate a novel 2-axes MEMS-based resonant magnetic field sensor. It is a compact magnetometer, build in a single MEMS layer, which measures the two in-plane components of magnetic field and this with equal relative sensitivity. Its principle of operation is based on Lorentz force acting on a current carrying conductor placed in a magnetic field B. The force is proportional to the magnetic field B and for this particular design it results in a torque exerted on the microstructure, resulting a rotation (teeter-tooter) motion of the structure, which on its turns is translated into a differential capacitance. The proposed magnetometer design fits a chip area less than 250[μm]×300[μm]. An analytical design approach is described to reach to the equal and maximal relative sensitivity. Using FEM simulations, A relative sensitivity 3547[T-1] was reached. The design makes that cross sensitivities between the 2-axes is as small as possible. Also, for the first time, we introduce an equivalent circuit of a torsional MEMS magnetometer. It was developed starting from the known transducers like electrodynamic and electrostatic transducers.