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Novel Teeter-Totter 2-Axes MEMS Magnetometer with Equal Sensitivities

Research Authors
M. A. Farghaly,V. Rochus, X. Rottenberg, U. S. Mohammed and H. A. C. Tilmans
Research Department
Research Year
2013
Research Journal
Eurosime 2013 conference Proc.
Research Publisher
NULL
Research Vol
NULL
Research Rank
3
Research_Pages
6
Research Website
http://www.eurosime.org/
Research Abstract

In this paper, we demonstrate a novel 2-axes MEMS-based resonant magnetic field sensor. It is a compact magnetometer, build in a single MEMS layer, which measures the two in-plane components of magnetic field and this with equal relative sensitivity. Its principle of operation is based on Lorentz force acting on a current carrying conductor placed in a magnetic field B. The force is proportional to the magnetic field B and for this particular design it results in a torque exerted on the microstructure, resulting a rotation (teeter-tooter) motion of the structure, which on its turns is translated into a differential capacitance. The proposed magnetometer design fits a chip area less than 250[μm]×300[μm]. An analytical design approach is described to reach to the equal and maximal relative sensitivity. Using FEM simulations, A relative sensitivity 3547[T-1] was reached. The design makes that cross sensitivities between the 2-axes is as small as possible. Also, for the first time, we introduce an equivalent circuit of a torsional MEMS magnetometer. It was developed starting from the known transducers like electrodynamic and electrostatic transducers.