Research Abstract
Both radial and spiral distortion of magnetic lens with the field distribution in the form B(z)αzn are analyzed by means of Scherzer's formula. To estimate the performance of the image in electron microscope the dimensionless quality factors (F.Z. Marai, T. Mulvey, Sherzer's formula and the correction of spiral distortion in the electron microscope, Ultramicroscopy 2 (1977) 187–192.), for both radial and spiral distortion is calculated. The results have been compared with different projector lenses.
Research Department
Research Journal
Optik
Research Member
Research Rank
1
Research Vol
Vol. 120. No. 18
Research Year
2009
Research Pages
PP. 984–986